JPH0230442Y2 - - Google Patents

Info

Publication number
JPH0230442Y2
JPH0230442Y2 JP1984135227U JP13522784U JPH0230442Y2 JP H0230442 Y2 JPH0230442 Y2 JP H0230442Y2 JP 1984135227 U JP1984135227 U JP 1984135227U JP 13522784 U JP13522784 U JP 13522784U JP H0230442 Y2 JPH0230442 Y2 JP H0230442Y2
Authority
JP
Japan
Prior art keywords
target
film
substrate
polyester base
base film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984135227U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6150758U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984135227U priority Critical patent/JPH0230442Y2/ja
Publication of JPS6150758U publication Critical patent/JPS6150758U/ja
Application granted granted Critical
Publication of JPH0230442Y2 publication Critical patent/JPH0230442Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1984135227U 1984-09-07 1984-09-07 Expired JPH0230442Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984135227U JPH0230442Y2 (en]) 1984-09-07 1984-09-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984135227U JPH0230442Y2 (en]) 1984-09-07 1984-09-07

Publications (2)

Publication Number Publication Date
JPS6150758U JPS6150758U (en]) 1986-04-05
JPH0230442Y2 true JPH0230442Y2 (en]) 1990-08-16

Family

ID=30693726

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984135227U Expired JPH0230442Y2 (en]) 1984-09-07 1984-09-07

Country Status (1)

Country Link
JP (1) JPH0230442Y2 (en])

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5538919A (en) * 1978-09-05 1980-03-18 Nec Corp Sputtering apparatus

Also Published As

Publication number Publication date
JPS6150758U (en]) 1986-04-05

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